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Fabrication of metal’s nanoparticles in silicon and sapphire by low energy ion implantation

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4 Author(s)
D. Kh. Mirkarimov ; Tashkent University of Information Technologies, 108 A. Temur str., 700084, Uzbekistan ; T. D. Radjabov ; A. I. Kamardin ; Z. T. Khakimov