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Design, Fabrication, and Characterization of a Readout Integrated Circuit (ROIC) for Capacitive MEMS Sensors

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6 Author(s)
MyungLae Lee ; Microsystem Team, IT Convergence & Components Laboratory (ICCL), Electronics & Telecommunications Research Institute (ETRI), Daejeon, Republic of Korea. E-mail: ; SungSik Lee ; SungHae Jung ; ChangHan Je
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