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High-Q BAW Resonator on Pt/Ta2O5/SiO2-based Reflector Stack

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6 Author(s)
Jan-Willem Lobeek ; NXP Semiconductors, BL RF Products, Nijmegen, Gerstweg 2,6534 AE, The Netherlands. e-mail: ; Remco Strijbos ; Andre Jansman ; Nancy Xin Li
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