We fabricated L10 FePt thin films by sputtering in reactive oxygen on polycrystalline glass substrates, and we investigated the magnetic properties and crystallographic orientations of the films. Oxygen addition during the FePt deposition promoted heteoroepitaxial growth by decreasing the lattice misfit with the Ag underlayer. In an oxygen/argon ratio of 1.5-3.0 vol.%, the in-plane lattice parameter of the FePt films expanded, and the lattice misfit with the Ag underlayer decreased from 6.3 to 3.9% in the as-deposited state, as determined by grazing incidence X-ray diffraction (GIXRD). Annealing at 700degC for 1 min produced a heteroepitaxially grown L10 (001) texture with a large out-of-plane coercivity of 8.8 kOe and a nucleation field of kOe. Transmission electron microscopy showed that average grain size in the as-deposited films was about 4-5 nm and was in the range of 10-15 nm in the annealed films, indicating that there was some grain growth.