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An Automatic MEMS Testing System based on Computer Microvision

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4 Author(s)
Zheng Dong ; School of Mechatronics Engineering, University of Electronic Science and Technology of China, No.4, 2nd Section, Jianshebei Road, Chengdu, Sichuan, 610054, China. Phone: +86-028-83204114, E-mail: ; Dagui Huang ; Deyin Zhang ; Wenrong Wu