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Multifunctional Probe Array and Local Vapor Inking Chip for Scanning Probe Nanolithography

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3 Author(s)
Li, Shifeng ; Micro and Nanotechnology Laboratory, University of Illinois at Urbana and Champaign, 208 North Wright Street, Urbana, IL, USA, 61801, lsfui@uiuc.edu ; Chang Liu ; Wang, Xuefeng

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