We have fabricated a microinductor with an ultralow profile by a microelectromechanical systems (MEMS) technique. The fabrication process uses UV-LIGA, dry etching, fine polishing, and electroplating to achieve high performance. The dimensions of the inductor are 1500 μm×900 μm×100 μm. It has 41 turns, with coil width of 20 μm, space of 20 μm, and a high aspect ratio of 5 : 1. The inductance is 0.424 μH and the quality factor (Q factor) is about 1.7 at a frequency of 1 MHz. The stray capacitance is approximately zero over the frequency range measured.