This research developed two types of multi-probe cantilever arrays for the parallel scanning probe microscope (SPM) based nanolithography (SPNL) with high rates of throughput. The multi-probe cantilever arrays have been fabricated by an anisotropic wet etching process. All probes have a sharp tip of a quasi-trihedral pyramidal shape composed of two (311) and  planes. Consequently, we have succeeded in fabrication of parallel nanometric wires and grooves on single crystal silicon (SCS) wafer using negative and positive type of SPNL techniques, respectively. Furthermore, a free suspended silicon nanowire used as a high frequency resonator was developed by the positive SPNL.