In this paper, we present an analysis of the performance of a 0.3-Tb/in2 ultralow-power magnetic-force-microscopy-based scanning-probe storage device actuated by microelectromechanical systems technology. The device is currently under development at Carnegie Mellon University, Pittsburgh, PA. The analysis shows that, with an optimized commercial single-layered Co-based perpendicular medium with an optimized tip trajectory, a signal-to-noise ratio of 20-25 dB is achievable. The analysis includes general design considerations as well as various aspects of performance such as recording dynamics, PW50, intersymbol-interference limit, detection sensitivity, thermal degradation, intertrack interference, off-track errors, process variations, and surface fluctuation effect. Design/performance standards for the new device are suggested.