Factory automation data management (FADM) system is a real-time computer control system. It can record all the process and hardware parameters during processing. The functions in the software include GUI, data communication, digital I/O, D/S control, etc. FADM was adopted in two single-wafer thermal process chambers, in-situ steam generation (ISSG) oxidation and LPCVD poly-silicon (POLYgen), to real-time monitoring the process parameters during processing. Mini-marathon tests for POLYgen and ISSG processes demonstrated that FADM could help engineers to obtain the process stability and its limitation. According to the FADM results, the chambers were retrofitted for process optimization.