Perpendicular magnetic CoCr films were prepared on glass substrates using electron beam evaporation. The magnetic properties depend strongly on the substrate temperature, Ts. The anisotropy field, , and the perpendicular coercivity, Hc( ) show maximum values at Tsaround 250°C. In this case, the alignment of c-axis is optimal and the grain size is smallest. The lattice spacing of the c-planes increases wlth Tsuntil 300°C. When the films prepared below 200°C were annealed around 300°C in high vacuum, the saturation magnetization, Ms, increased. The value of Ms, however, decrease by annealing above 400°C. In spite of the decrease of Msdue to the annealing above 400°C, and Hc( ) increase by annealing above 400°C. If the films were bombarded by argon ions during film growth, Msdecreased and the internal stress changed from tensile to compressive. For low substrate temperature (below 150°C), decreased due to ion bombardment.