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Electrostatic bottom-driven rotary stage on multiple conductive liquid-ring bearings

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5 Author(s)
Tingyi Leo Liu ; Mechanical and Aerospace Engineering Department, University of California, Los Angeles (UCLA) ; Guangyi Sun ; Jong Jin Kim ; Chih-Kong Ken Yang
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Author(s)

Tingyi Leo Liu
Mechanical and Aerospace Engineering Department, University of California, Los Angeles (UCLA)
Guangyi Sun ; Jong Jin Kim ; Chih-Kong Ken Yang ; Chang-Jin C J Kim