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On-chip integrated PS3 (Packaging-Stress Suppressed Suspension) for thermal-stress fress package of pressure sensors

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3 Author(s)
Jiachou Wang ; State Key Lab. of Transducer Technol., Inst. of Microsyst. & Inf. Technol., Shanghai, China ; Lijian Yang ; Xinxin Li

Author(s)

Jiachou Wang
State Key Lab. of Transducer Technol., Inst. of Microsyst. & Inf. Technol., Shanghai, China
Lijian Yang ; Xinxin Li