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Light-induced degradation, quantum efficiencies, thickness uniformity, Raman spectra, and secondary ion microspectroscopy for a-Si:H/μc-Si:H films are analyzed for 2.2 m × 2.6 m thin-film solar modules that are produced in the manufacturing line. The results of the characterization and analyses are used to optimize parameters of the process and improve efficiencies of the devices. The average of the measured total area stabilized efficiencies for 779 modules with an area of 5.7 m2 is higher than 9.2%. The I-V curve of a 5.7 m2 module shows a stabilized conversion efficiency higher than 9.7%.