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Microfabrication and characterization of metal-embedded thin-film thermomechanical microsensors for applications in hostile manufacturing environments

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4 Author(s)
Hongseok Choi ; Dept. of Mech. Eng., Univ. of Wisconsin-Madison, Madison, WI, USA ; Datta, A. ; Xudong Cheng ; Xiaochun Li

Author(s)

Hongseok Choi
Dept. of Mech. Eng., Univ. of Wisconsin-Madison, Madison, WI, USA
Datta, A. ; Xudong Cheng ; Xiaochun Li