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AFM probe tips using heavily boron-doped silicon cantilevers realized in a <110> bulk silicon wafer

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3 Author(s)
Il-Joo Cho ; Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea ; Eun-Chul Park ; Euisik Yoon

Author(s)

Il-Joo Cho
Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea
Eun-Chul Park ; Euisik Yoon