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Gas phase pulse etching of silicon for MEMS with xenon difluoride

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6 Author(s)
Chan, I.W.T. ; Dept. of Electr. & Comput. Eng., Alberta Univ., Edmonton, Alta., Canada ; Brown, K.B. ; Lawson, R.P.W. ; Robinson, A.M.
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Author(s)

Chan, I.W.T.
Dept. of Electr. & Comput. Eng., Alberta Univ., Edmonton, Alta., Canada
Brown, K.B. ; Lawson, R.P.W. ; Robinson, A.M. ; Yuan Ma ; Strembicke, D.