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Petri Net-Based Optimal One-Wafer Scheduling of Single-Arm Multi-Cluster Tools in Semiconductor Manufacturing

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4 Author(s)
QingHua Zhu ; School of Computers, Guangdong University of Technology, Guangzhou, China ; NaiQi Wu ; Yan Qiao ; MengChu Zhou

Author(s)

QingHua Zhu
School of Computers, Guangdong University of Technology, Guangzhou, China
NaiQi Wu ; Yan Qiao ; MengChu Zhou