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Investigation on the properties and processability of polymeric insulation layers for through silicon via

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7 Author(s)
Songfang Zhao ; Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, China ; Guoping Zhang ; Chongnan Peng ; Rong Sun
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Author(s)

Songfang Zhao
Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, China
Guoping Zhang ; Chongnan Peng ; Rong Sun ; S. W. Ricky Lee ; Wenhui Zhu ; Fangqi Lai