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Analysis of Dynamic Pressure Distribution on the Mold in Compressional Gas Cushion Press Nanoimprint Lithography

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6 Author(s)
Li Tianhao ; Phys. Eng. Coll., Zhengzhou Univ., Zhengzhou, China ; Zheng Guoheng ; Liu Chaoran ; Xia Weiwei
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Author(s)

Li Tianhao
Phys. Eng. Coll., Zhengzhou Univ., Zhengzhou, China
Zheng Guoheng ; Liu Chaoran ; Xia Weiwei ; Li Dongxue ; Duan Zhiyong