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A Test Circuit for Extremely Low Gate Leakage Current Measurement of 10 aA for 80 000 MOSFETs in 80 s

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7 Author(s)
Takuya Inatsuka ; Graduate School of Engineering, Tohoku University, Sendai, Japan ; Yuki Kumagai ; Rihito Kuroda ; Akinobu Teramoto
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Author(s)

Takuya Inatsuka
Graduate School of Engineering, Tohoku University, Sendai, Japan
Yuki Kumagai ; Rihito Kuroda ; Akinobu Teramoto ; Tomoyuki Suwa ; Shigetoshi Sugawa ; Tadahiro Ohmi