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Electrochemical Induced Pitting Defects at Gate Oxide Patterning

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3 Author(s)
Jungtae Park ; Samsung Electron. Co., Ltd., Yongin, South Korea ; Sungjin Cho ; Hawthorne, J.

Author(s)

Jungtae Park
Samsung Electron. Co., Ltd., Yongin, South Korea
Sungjin Cho ; Hawthorne, J.