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Impact of Underwater Laser Annealing on Polycrystalline Silicon Thin-Film Transistor for Inactivation of Electrical Defects at Super Low Temperature

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6 Author(s)
Emi Machida ; Graduate School of Materials Science, Nara Institute of Science and Technology, Ikoma, Japan ; Masahiro Horita ; Koji Yamasaki ; Yasuaki Ishikawa
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Author(s)

Emi Machida
Graduate School of Materials Science, Nara Institute of Science and Technology, Ikoma, Japan
Masahiro Horita ; Koji Yamasaki ; Yasuaki Ishikawa ; Yukiharu Uraoka ; Hiroshi Ikenoue