Enhanced permeability dielectric (EPD) samples were fabricated in an ultra-high-vacuum magnetron sputtering system, and their magnetic properties were studied by a variable-temperature vibrating sample magnetometer. EPDs were fabricated with layers of CoFe forming uniform particles separated by MgO dielectric as insulator. The optimal sample has peak relative low-field permeability (μr) of 452, saturation magnetization (Ms) of 636 emu/cm3 and magnetization at 100 Oe (M100 Oe) of 398 emu/cm3. Effect of low temperature is discussed, and measurements show that the EPD remains superparamagnetic at 173 K; μr, Ms and M100 Oe values at reduced temperatures are higher than those at room temperature. The sample is ferromagnetic at 100 K.