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Atomic layer deposited zinc tin oxide channel for amorphous oxide thin film transistors

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3 Author(s)
Heo, Jaeyeong ; Department of Chemistry and Chemical Biology, Harvard University, Cambridge, Massachusetts 02138, USA ; Bok Kim, Sang ; Gordon, Roy G.

Author(s)

Heo, Jaeyeong
Department of Chemistry and Chemical Biology, Harvard University, Cambridge, Massachusetts 02138, USA
Bok Kim, Sang ; Gordon, Roy G.