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Low-temperature, site selective graphitization of SiC via ion implantation and pulsed laser annealing

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10 Author(s)
Lemaitre, Maxime G. ; Department of Materials Science & Engineering, University of Florida, Gainesville, Florida 32601, USA ; Tongay, Sefaattin ; Wang, Xiaotie ; Venkatachalam, Dinesh K.
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Author(s)

Lemaitre, Maxime G.
Department of Materials Science & Engineering, University of Florida, Gainesville, Florida 32601, USA
Tongay, Sefaattin ; Wang, Xiaotie ; Venkatachalam, Dinesh K. ; Fridmann, Joel ; Gila, Brent P. ; Hebard, Arthur F. ; Ren, Fan ; Elliman, Robert G. ; Appleton, Bill R.