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Thermally Robust Ni Germanide Technology Using Cosputtering of Ni and Pt for High-Performance Nanoscale Ge MOSFETs

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8 Author(s)
Min-Ho Kang ; Dept. of Electron. Eng., Chungnam Nat. Univ., Daejeon, South Korea ; Hong-Sik Shin ; Jung-Ho Yoo ; Ga-Won Lee
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Author(s)

Min-Ho Kang
Dept. of Electron. Eng., Chungnam Nat. Univ., Daejeon, South Korea
Hong-Sik Shin ; Jung-Ho Yoo ; Ga-Won Lee ; Jung-Woo Oh ; Majhi, P. ; Jammy, R. ; Hi-Deok Lee