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A new baseband equivalent model for sense mode dynamics and its effects on force-feedback controller design for MEMS gyroscopes

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3 Author(s)
Burak Eminoglu ; Dept. of Electrical and Electronics Engineering, Middle East Technical University, Ankara, Turkey ; Said Emre Alper ; Tayfun Akin

Author(s)

Burak Eminoglu
Dept. of Electrical and Electronics Engineering, Middle East Technical University, Ankara, Turkey
Said Emre Alper ; Tayfun Akin