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High-Performance 4H–SiC-Based Metal–Insulator–Semiconductor Ultraviolet Photodetectors With \hbox {SiO}_{2} and \hbox {Al}_{2}\hbox {O}_{3}\hbox {/}\hbox {SiO}_{2} Films

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11 Author(s)
Feng Zhang ; Key Laboratory of Semiconductor Material Sciences and the Material Science Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, China ; Guosheng Sun ; Huolin Huang ; Zhengyun Wu
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Author(s)

Feng Zhang
Key Laboratory of Semiconductor Material Sciences and the Material Science Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, China
Guosheng Sun ; Huolin Huang ; Zhengyun Wu ; Lei Wang ; Wanshun Zhao ; Xingfang Liu ; Guoguo Yan ; Liu Zheng ; Lin Dong ; Yiping Zeng