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Lateral gate suspended-body carbon nanotube field-effect-transistors with sub-100nm air gap by precise positioning method

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2 Author(s)
Ji Cao ; Nanoelectronic Devices Lab. (Nanolab), Ecole Polytech. Fed. de Lausanne, Lausanne, Switzerland ; Ionescu, A.M.

Author(s)

Ji Cao
Nanoelectronic Devices Lab. (Nanolab), Ecole Polytech. Fed. de Lausanne, Lausanne, Switzerland
Ionescu, A.M.