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A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications

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10 Author(s)
Min-Woo Jang ; Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA ; Chia-Ling Chen ; Partlo, W.E. ; Patil, S.R.
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Author(s)

Min-Woo Jang
Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA
Chia-Ling Chen ; Partlo, W.E. ; Patil, S.R. ; Dongjin Lee ; Zhijiang Ye ; Lilja, D. ; Taton, T.A. ; Cui, Tianhong ; Campbell, Stephen A.