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Investigations of Novel \Gamma -Gate MOS-HEMTs by Ozone Water Oxidation and Shifted Exposure Techniques

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8 Author(s)
Ching-Sung Lee ; Department of Electronic Engineering, Feng Chia University, Taichung, Taiwan ; Bo-Yi Chou ; Sheng-Han Yang ; Wei-Chou Hsu
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Author(s)

Ching-Sung Lee
Department of Electronic Engineering, Feng Chia University, Taichung, Taiwan
Bo-Yi Chou ; Sheng-Han Yang ; Wei-Chou Hsu ; Chang-Luen Wu ; Wen Luh Yang ; Don-Gey Liu ; Ming-Yuan Lin