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A low operating power FinFET transistor module featuring scaled gate stack and strain engineering for 32/28nm SoC technology

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33 Author(s)
Chih-Chieh Yeh ; Research & Development, Taiwan Semiconductor Manufacturing Company, No. 8, Li-Hsin 6th Rd., Hsinchu, Taiwan 30077, R.O.C. ; Chih-Sheng Chang ; Hong-Nien Lin ; Wei-Hsiung Tseng
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