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High-Performance Silicon Nanowire Gate-All-Around nMOSFETs Fabricated on Bulk Substrate Using CMOS-Compatible Process

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7 Author(s)
Yi Song ; Inst. of Microelectron., Chinese Acad. of Sci., Beijing, China ; Huajie Zhou ; Qiuxia Xu ; Niu, Jiebin
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Author(s)

Yi Song
Inst. of Microelectron., Chinese Acad. of Sci., Beijing, China
Huajie Zhou ; Qiuxia Xu ; Niu, Jiebin ; Jiang Yan ; Chao Zhao ; Huicai Zhong