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Impact of Metal Gate Granularity on Threshold Voltage Variability: A Full-Scale Three-Dimensional Statistical Simulation Study

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4 Author(s)
Brown, A.R. ; Sch. of Eng., Univ. of Glasgow, Glasgow, UK ; Idris, N.M. ; Watling, J.R. ; Asenov, A.

Author(s)

Brown, A.R.
Sch. of Eng., Univ. of Glasgow, Glasgow, UK
Idris, N.M. ; Watling, J.R. ; Asenov, A.