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Abnormal trend detection of sequence-disordered data using EWMA method [wafer fabrication]

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4 Author(s)
Jr-Min Fan ; Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan ; Ruey-Shan Guo ; Chang, S.-C. ; Jian-Huei Lee

Author(s)

Jr-Min Fan
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Ruey-Shan Guo ; Chang, S.-C. ; Jian-Huei Lee