A 14.5 GHz Injection Locked Oscillator (ILO) with digital output phase control has been implemented in a 90 nm CMOS process. It is intended for LO signal generation in integrated phased array transceivers. The chip, measuring 360×530 μm2 including pads, was characterized using on-wafer probing. It has a 1.4 GHz frequency range where full 360° phase range is achieved with 3rd order subharmonic mixers. The free running phase noise is -105 dBc/Hz at 1 MHz offset. It consumes 9.4 mA from a 1.2 V supply.