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Integration of Carbon Nanotubes to C-MEMS for On-chip Supercapacitors

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7 Author(s)
Wei Chen ; Department of Mechanical and Materials Engineering, Florida International University, Miami, USA ; Majid Beidaghi ; Varun Penmatsa ; Kevin Bechtold
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Author(s)

Wei Chen
Department of Mechanical and Materials Engineering, Florida International University, Miami, USA
Majid Beidaghi ; Varun Penmatsa ; Kevin Bechtold ; Latha Kumari ; W. Z. Li ; Chunlei Wang