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Modifying single crystalline silicon by Tribo nanolithography for pulsed hybrid electrochemical nanolithography applications

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4 Author(s)
Jeong Woo Park ; Department of Mechanical Design Engineering, Chosun University, 375, Seosuk-dong, Dong-gu, Gwangju, 501-759, KOREA ; Sun Ho Kim ; Jeong Min Lee ; Noboru Morita

Author(s)

Jeong Woo Park
Department of Mechanical Design Engineering, Chosun University, 375, Seosuk-dong, Dong-gu, Gwangju, 501-759, KOREA
Sun Ho Kim ; Jeong Min Lee ; Noboru Morita