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Functional Kernel-Based Modeling of Wavelet Compressed Optical Emission Spectral Data: Prediction of Plasma Etch Process

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5 Author(s)
Young-Don Ko ; Department of Industrial and Information Engineering, University of Tennessee, Knoxville, TN, USA ; Young-Seon Jeong ; Myong-Kee Jeong ; Alberto Garcia-Diaz
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Author(s)

Young-Don Ko
Department of Industrial and Information Engineering, University of Tennessee, Knoxville, TN, USA
Young-Seon Jeong ; Myong-Kee Jeong ; Alberto Garcia-Diaz ; Byungwhan Kim