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Reducing anchor loss in micromechanical extensional mode resonators

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4 Author(s)
Vahdettin Tas ; Bilkent University, Ankara, Turkey ; Selim Olcum ; M. Deniz Aksoy ; Abdullah Atalar

Author(s)

Vahdettin Tas
Bilkent University, Ankara, Turkey
Selim Olcum ; M. Deniz Aksoy ; Abdullah Atalar