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Nitridation behavior of sapphire using a carbon-saturated N2CO gas mixture

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7 Author(s)
Fukuyama, H. ; Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan ; Nakamura, Katsuhito ; Aikawa, Toshiaki ; Kobatake, Hidekazu
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Author(s)

Fukuyama, H.
Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
Nakamura, Katsuhito ; Aikawa, Toshiaki ; Kobatake, Hidekazu ; Hakomori, Akira ; Takada, Kazuya ; Hiraga, K.

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