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Metal Edge Coverage and Control of Charge Accumulation in RF Sputtered Insulators

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3 Author(s)
Logan, J.S. ; IBM Components Division Laboratory, East Fishkill, New York 12533, USA ; Maddocks, F.S. ; Davidse, P.D.

Author(s)

Logan, J.S.
IBM Components Division Laboratory, East Fishkill, New York 12533, USA
Maddocks, F.S. ; Davidse, P.D.