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Design and modeling of equipment used in electrochemical processes for microelectronics

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6 Author(s)
Ritzdorf, T.L. ; Semitool, Inc., 655 West Reserve Drive, Kalispell, Montana 59901, USA ; Wilson, G.J. ; McHugh, P.R. ; Woodruff, D.J.
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Author(s)

Ritzdorf, T.L.
Semitool, Inc., 655 West Reserve Drive, Kalispell, Montana 59901, USA
Wilson, G.J. ; McHugh, P.R. ; Woodruff, D.J. ; Hanson, K.M. ; Fulton, D.