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1.05-GHz CMOS oscillator based on lateral- field-excited piezoelectric AlN contour- mode MEMS resonators

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3 Author(s)
Chengjie Zuo ; Dept. of Electr. & Syst. Eng., Univ. of Pennsylvania, Philadelphia, PA, USA ; Van der Spiegel, J. ; Piazza, G.

Author(s)

Chengjie Zuo
Dept. of Electr. & Syst. Eng., Univ. of Pennsylvania, Philadelphia, PA, USA
Van der Spiegel, J. ; Piazza, G.