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Bipolar integrated Kelvin test structure for contact resistance measurement of self-aligned implantations

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3 Author(s)
Nanver, L.K. ; Inst. for Microelectron. & Submicron Technol., Delft Univ. of Technol., Netherlands ; Goudena, E.J.G. ; Slabbekoorn, J.

Author(s)

Nanver, L.K.
Inst. for Microelectron. & Submicron Technol., Delft Univ. of Technol., Netherlands
Goudena, E.J.G. ; Slabbekoorn, J.