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Reliability-based characterization of single crystalline silicon micromirrors for space applications

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5 Author(s)
Byung-Wook Yoo ; Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., Seoul, South Korea ; Jae-Hyoung Park ; Joo-Young Jin ; Park, I.H.
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Author(s)

Byung-Wook Yoo
Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., Seoul, South Korea
Jae-Hyoung Park ; Joo-Young Jin ; Park, I.H. ; Yong-Kweon Kim