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The proposed CMOS-MEMS optical phase shifter activates lambda/4 vertical displacement with 3 V driving voltages and achieves the mirror deformation within lambda/10. The fill factor is 90% without the need of flip-chip bonding technology.
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Date of Conference:
17-20 Aug. 2009
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