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A photovoltaic PN-junction vertical comb-drive micro-actuator

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6 Author(s)
Hsin-Yu Huang ; Power Mechanical Eng. Dept., National Tsing Hua University, Taiwan ; Hsiu-Ting Hsu ; Lin, Hung-Yi ; Yi Chiu
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Author(s)

Hsin-Yu Huang
Power Mechanical Eng. Dept., National Tsing Hua University, Taiwan
Hsiu-Ting Hsu ; Lin, Hung-Yi ; Yi Chiu ; Jin-Chern Chiou ; Weileun Fang