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Various Shaped Semiconductor Microlens Arrays Fabricated by Selective Oxidation of AlGaAs

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5 Author(s)
Ki Soo Chang ; Div. of Instrum. Dev., Korea Basic Sci. Inst., Daejeon, South Korea ; Sun Cheol Yang ; Song, Young Min ; Lee, Yong Tak
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Author(s)

Ki Soo Chang
Div. of Instrum. Dev., Korea Basic Sci. Inst., Daejeon, South Korea
Sun Cheol Yang ; Song, Young Min ; Lee, Yong Tak ; Geon Hee Kim